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Título del libro: 2007 Spanish Conference On Electron Devices, Proceedings
Título del capítulo: Equivalent electrical circuit model for the post breakdown current in SiO2/TiO22 gate stacks

Autores UNAM:
JULIO CESAR TINOCO MAGAÑA;
Autores externos:

Idioma:

Año de publicación:
2007
Palabras clave:

Breakdown; MOS; Reliability


Resumen:

In this work we examine the electrical behavior of thin (~10 nm) SiO 2ATiO2 gate insulator stacks in MOS capacitors that have undergone multiple hard breakdown events. The post-breakdown current is modeled using a simple equivalent electrical circuit consisting of a diode with series and parallel resistances. We show that the current flowing through the nondamaged oxide area still plays a significant role even after breakdown. Similarities with previous studied systems are also discussed. © 2007 IEEE.


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